LEYBOLD:
The TURBOVAC models 50 to 1000 are turbomolecular pumps featuring grease-lubricated bearings. These units are engineered to pump vacuum chambers down to pressures in the high-vacuum range. A TURBOTRONIK frequency converter and a forevacuum pump are required for the operation of the TURBOVAC. These units are not suitable for operation without a forevacuum pump. Turbomolecular pumps are not suitable for pumping either gases which contain dust particles or liquids. Turbomolecular pumps without a purge gas feature are suitable only for moving air or inert gases. They are not suitable for pumping aggressive or reactive gases. TURBOVAC versions identified with a “C” in the model number are equipped with this purge gas feature, it protects only the bearing area and the motor in the TURBOVAC. Some media (such as aluminum trichloride) can sublime inside the pump and form deposits. Thick deposits reduce the play between moving parts to the point that the pump could seize. In some processes deposits can be prevented by heating the pump. Please consult with us in case such problems arise. Corrosive gases (such as chlorine) can destroy the rotors. During operation the pressure inside the TURBOVAC is so low that there is no danger of ignition (at pressures below about 100 mbar, 75 Torr). A hazardous condition will be created if flammable mixtures enter the hot pump at pressures above 100 mbar (75 Torr). During operation the pump can reach temperatures as high as 120°C (248 °F). Sparks could occur in case of damage to the pump and these could ignite explosive mixtures. We would be glad to consult with you as regards the media which can safely be handled with this unit.
|
TMP TECHNICAL DATA |
VALUE |
50 |
50 |
50 |
50 |
151 |
151 |
151C |
361 |
361 |
361C |
361C |
1000C |
1000C |
1000C |
|
High Vacuum Port |
nom. diam. |
40 KF |
40 CF |
63 ISO-K |
63 CF |
63 ISO-K
100 CF |
100 ISO-K |
100 ISO-K |
100 ISO-K
100 CF |
160 ISO-K
160 CF |
100 ISO-K |
160 ISO-K |
160 ISO-K
160 CF |
6" ANSI
200 CF |
250 ISO-K |
|
Pumping Speed for N2 |
l/sec |
33 |
33 |
55 |
55 |
115 |
145 |
145 |
345 |
400 |
345 |
400 |
850 |
1100 |
1150 |
|
Ultimate Pressure |
mbar |
8 x 10-9 |
< 10-9 |
8 x 10-9 |
< 10-9 |
< 10-10 |
< 10-10 |
< 10-10 |
< 10-10 |
< 10-10 |
< 10-10 |
< 10-10 |
< 10-10 |
< 10-10 |
< 10-10 |
|
Forevacuum Pressure |
mbar |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
10-3-10-2 |
10-3-10-2 |
10-3-10-2 |
|
Recommended
Forevacuum pump |
Trivac |
D2.5E |
D2.5E |
D2.5E |
D2.5E |
D4B |
D4B |
D16B |
D16B |
D16B |
D16B |
D25B |
D40B |
D40B |
D40B |
|
Recommended Frequency
Converter |
NT |
10/12/13 |
10/12/13 |
10/12/13 |
10/12/13 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
|
Speed |
rpm |
72 000 |
72 000 |
72 000 |
72 000 |
50 000 |
50 000 |
50 000 |
45 000 |
45 000 |
45 000 |
45 000 |
36 000 |
36 000 |
36 000 |
|
Coolant Flow Rate
at 15 degrees Celcius |
l/hr |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
20 |
|
Forevacuum Port |
nom. diam. |
16 KF |
16 KF |
16 KF |
16 KF |
25 KF |
25 KF |
25 KF |
25 KF |
25 KF |
25 KF |
25 KF |
40 KF/ 63 ISO-K |
40 KF |
40 KF/ 63 ISO-K |
|
Vent Port |
nom. diam. |
- |
10 KF |
- |
10 KF |
- |
10 KF |
10 KF |
10 KF |
10 KF |
10 KF |
10 KF |
10 KF3) |
10 KF3) |
10 KF3) |
|
Weight |
kg |
2 |
2 |
2 |
2 |
8 |
8 |
8 |
12 |
12 |
12 |
12 |
55 |
55 |
55 |
|
Maximum Ambient
Temperature at Operation |
Celcius |
- |
80 |
- |
80 |
55 |
55 |
55 |
55 |
55 |
55 |
55 |
55 |
55 |
55 |
|
VARIAN:
The Innovative MacroTorr Pumps can operate at high foreline pressures and they allow the use of diaphragm roughing pumps, proving a clean oil free pumping package. Ceramic bearing pumps deliver long operating life and provide reduced rolling friction, low stress, high thermal stability, and high elasticity module as compared to conventional stainless steel bearings. Proprietary ulta-low vapor pressure solid lubricant eliminates the need for routine maintence and assures clean operation incase of misuse. Designed to withstand heavy industrial use, Turbo-V pumps recover quickly from accidently air in-rushes. Corrosion resistant versions ensure safe operation in systems.
|
TECHNICAL DATA |
VALUE |
V70 |
V70 |
V70D |
V70D |
V70LP |
V70LP |
V150HT |
V150HT |
V250 |
V300HT |
V300HT |
V550 |
V550 |
V700 |
V1000 |
|
Pump Specifications |
- |
KF 40 |
ISO 63 |
KF 40 |
KF 63 |
KF 40 |
KF 63 |
KF 63 |
ISO 100 |
ISO 100 |
ISO 100 |
ISO 160 |
ISO 100 |
ISO 100 |
ISO 200 |
ISO 200 |
|
Pumping Speed
Nitrogen
Helium
Hydrogen |
l/s |
46
52
42 |
68
60
45 |
40
27
20 |
60
30
20 |
46
52
42 |
68
60
45 |
100
105
100 |
130
120
110 |
250
220
200 |
250
220
200 |
280
230
210 |
350
150
450 |
550
600
510 |
690
620
510 |
950
870
900 |
|
Compression Ratio
Nitrogen
Helium
Hydrogen |
- |
5 x 107
4 x 103
4 x 102 |
5 x 107
4 x 103
4 x 102 |
5 x 107
7 x 103
1.5 x 103 |
5 x 107
7 x 103
1.5 x 103 |
5 x 108
8 x 104
1 x 104 |
5 x 108
8 x 104
1 x 104 |
3 x 108
8 x 105
9 x 104 |
3 x 108
8 x 105
9 x 104 |
2 x 108
8 x 105
9 x 104 |
2 x 108
1 x 105
1 x 104 |
2 x 108
1 x 105
1 x 104 |
> 1 x 109
1 x 107
1 x 106 |
> 1 x 109
1 x 107
1 x 106 |
> 1 x 109
1 x 107
1 x 106 |
> 1 x 1010
2 x 107
1 x 106 |
|
Ultimate Pressure
with mechanical pump
with diaphragm pump |
mbar |
1 x 10-9
N/A |
1 x 10-9
N/A |
1 x 10-9
1 x 10-6 |
1 x 10-9
1 x 10-6 |
2 x 10-10
2 x 10-9 |
2 x 10-10
2 x 10-9 |
2 x 10-10
2 x 10-8 |
2 x 10-10
2 x 10-9 |
2 x 10-10
2 x 10-9 |
2 x 10-10
2 x 10-8 |
2 x 10-10
2 x 10-8 |
< 1 x 10-10
2 x 10-9 |
< 1 x 10-10
2 x 10-9 |
< 1 x 10-10
2 x 10-9 |
1 x 10-10
2 x 10-9 |
|
Rotational Speed |
rpm |
75,000 |
75,000 |
75,000 |
75,000 |
75,000 |
75,000 |
62,000 |
62,000 |
56,000 |
56,000 |
56,000 |
42,000 |
42,000 |
42,000 |
38,000 |
|
Minumum Recommended
Two-stage Mechanical Pump
Diaphragm |
- |
SD40
N/A |
SD40
N/A |
SD40
MD12 |
SD40
MD12 |
SD40
MD12 |
SD40
MD12 |
SD40
MD12 |
SD40
MD12 |
SD40
MD30 |
SD300
MD60 |
SD300
MD60 |
SD300
MD60 |
SD300
MD60 |
SD450
MD60 |
SD450
MD60 |
|
Forline Flange
Klamp Flange |
nom. diam. |
NW16 |
NW16 |
NW16 |
NW16 |
NW16 |
NW16 |
NV16 |
NW16 |
NW16 |
NW25 |
NW25 |
NW25 |
NW25 |
NW25 |
NW40 | |
Turbo's
