| TECHNICAL DATA | Value | V70 | V70 | V70D | V70D | V70LP | V70LP | V150HT | V150HT | V250 | V300HT | V300HT | V550 | V550 | V700 | V1000 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Pump Specifications | - | KF 40 | ISO 63 | KF 40 | KF 63 | KF 40 | KF 63 | KF 63 | ISO 100 | ISO 100 | ISO 100 | ISO 160 | ISO 100 | ISO 100 | ISO 200 | ISO 200 |
| Pumping Speed Nitrogen Helium Hydrogen | 1/s | 46 52 42 | 69 60 45 | 40 27 20 | 60 30 20 | 46 52 42 | 68 60 45 | 100 105 100 | 130 120 110 | 250 220 200 | 250220200 | 280 230 210 | 350 150 450 | 550 600 510 | 690 620 510 | 950 870 900 |
| Compression Ratio Nitrogen Helium Hydrogen | - | 5 x 107 4 x 103 4 x 102 | 5 x 107 4 x 103 4 x 102 | 5 x 107 7 x 103 1.5 x 103 | 5 x 107 7 x 103 1.5 x 103 | 5 x 1088 x 1041 x 104 | 5 x 1087 x 1041 x 104 | 3 x 108 8 x 105 9 x 104 | 3 x 108 8 x 105 9 x 104 | 2 x 108 8 x 105 9 x 104 | 2 x 108 1 x 105 1 x 104 | 2 x 108 1 x 105 1 x 104 | >1 x 109 1 x 107 1 x 106 | >1 x 109 1 x 107 1 x 106 | >1 x 109 1 x 107 1 x 106 | >1 x 1010 2 x 107 1 x 106 |
| Ultimate Pressure with mechanical pump with diaphragm pump | mbar | 1 x 10-9 N/A | 1 x 10-9 N/A | 1 x 10-9 1 x 10-6 | 1 x 10-9 1 x 10-6 | 2 x 10-102 x 10-9 | 2 x 10-102 x 10-9 | 2 x 10-102 x 10-8 | 2 x 10-102 x 10-9 | 2 x 10-102 x 10-9 | 2 x 10-102 x 10-8 | 1 x 10-102 x 10-9 | <1 x 10-102 x 10-9 | <1 x 10-102 x 10-9 | <1 x 10-102 x 10-9 | 1 x 10-102 x 10-9 |
| Rotational Speed | rpm | 75,000 | 75,000 | 75,000 | 75,000 | 75,000 | 75,000 | 62,000 | 62,000 | 65,000 | 56,000 | 56,000 | 42,000 | 42,000 | 42,000 | 38,000 |
| Minumum Recommended Two-stage Mechanical Pump Diaphragm | - |
SD40
N/A |
SD40
N/A |
SD40
MD12 |
SD40
MD12 |
SD40
MD12 |
SD40
MD12 |
SD40
MD12 |
SD40
MD12 |
SD40
MD30 |
SD300
MD60 |
SD300
MD60 |
SD300
MD60 |
SD300
MD60 |
SD450
MD60 |
SD450
MD60 |
| Forline Flange Klamp Flange |
nom. diam. |
NW16 |
NW16 |
NW16 |
NW16 |
NW16 |
NW16 |
NV16 |
NW16 |
NW16 |
NW25 |
NW25 |
NW25 |
NW25 |
NW25 |
NW40 |